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Rating: 
Summary: A quick review
Review: A great book that gives a quick overview from contact printing and projection aligners (1970's and early 1980's technology), but it spends most of its time and effort on the more recent (2000's) technology and processes. There was information packed into each page, providing both an overview and detail into the more recent development of lithography. It helps to have some previous exposure to lithography as well as the topics of physics, optics, and chemistry since the book will build on all of these subjects to provide the basis of the newer technology.
Rating:
Summary: Great Text Book for Microlithography
Review: The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.
Rating:
Summary: E-beam Lithography
Review: The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography. I would definitely recommend this book to other students.
Rating:
Summary: best book for the pro
Review: this book consists almost everything u need to be a lithographer and is also concise and up-to-date!also the price is not too high. good book!
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